Authors

Houshmand Sharifi, Shamin; Derakhshandeh, Jaber; Armini, Silvia; De Preter, Inge; Bex, Pieter; Hou, Lin; Bartha, Johan W; Neumann, Volker; Herregods, Sebastiaan; Nagano, Fuya; Rebibis, Kenneth June; Miller, Andy; De Wolf, Ingrid; Beyer, Gerald; Beyne, Eric

Conference

Materials for Advanced Metallization Conference - MAM

Title

Comparing SAM (Self-Assembled Monolayer) deposition methods to passivate copper microbumps for 3D stacking

Publication type

Meeting abstract