Authors

Huang, Chih Hsien; Gao, Hang; Haouari, Rachid; Troia, Benedetto; Mao, Shengping; Jansen, Roelof; Rochus, Veronique; Rottenberg, Xavier

Conference

IEEE International Ultrasonics Symposium - IUS

Title

Frequency response and mode shape characterization for acoustic sensor in micro-opto-mechanical technology

Publication type

Proceedings paper

Embargo date

9999-12-31