Influence of Si wafer thinning processes on (Sub)surface defects

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Authors
Inoue, Fumihiro; Jourdain, Anne; Peng, Lan; Phommahaxay, Alain; De Vos, Joeri; Rebibis, Kenneth June; Miller, Andy; Sleeckx, Erik; Beyne, Eric; Uedono, Akira
ISSN
0169-4332
Journal
Applied Surface Science
Volume
404
Title
Influence of Si wafer thinning processes on (Sub)surface defects
Publication type
Journal article
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