Publication:

Influence of Si wafer thinning processes on (Sub)surface defects

Date

2017

Journal article

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Author(s)

Inoue, Fumihiro

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Phommahaxay, Alain

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Rebibis, Kenneth June

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Journal

Applied Surface Science

Metrics

1900 since deposited on 2021-10-24

Acq. date: 2025-12-12