dc.contributor.author | Inoue, Fumihiro | |
dc.contributor.author | Jourdain, Anne | |
dc.contributor.author | Peng, Lan | |
dc.contributor.author | Phommahaxay, Alain | |
dc.contributor.author | De Wolf, Ingrid | |
dc.contributor.author | Rebibis, Kenneth June | |
dc.contributor.author | Miller, Andy | |
dc.contributor.author | Sleeckx, Erik | |
dc.contributor.author | Beyne, Eric | |
dc.date.accessioned | 2021-10-24T06:06:37Z | |
dc.date.available | 2021-10-24T06:06:37Z | |
dc.date.issued | 2017 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/28564 | |
dc.source | IIOimport | |
dc.title | Edge shape control for bonded wafer | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Inoue, Fumihiro | |
dc.contributor.imecauthor | Jourdain, Anne | |
dc.contributor.imecauthor | Peng, Lan | |
dc.contributor.imecauthor | Phommahaxay, Alain | |
dc.contributor.imecauthor | De Wolf, Ingrid | |
dc.contributor.imecauthor | Rebibis, Kenneth June | |
dc.contributor.imecauthor | Miller, Andy | |
dc.contributor.imecauthor | Sleeckx, Erik | |
dc.contributor.imecauthor | Beyne, Eric | |
dc.contributor.orcidimec | Peng, Lan::0000-0003-1824-126X | |
dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
dc.contributor.orcidimec | Sleeckx, Erik::0000-0003-2560-6132 | |
dc.contributor.orcidimec | Beyne, Eric::0000-0002-3096-050X | |
dc.source.peerreview | no | |
dc.source.conference | WaferBond Conference | |
dc.source.conferencedate | 27/11/2017 | |
dc.source.conferencelocation | Leuven Belgium | |
imec.availability | Published - imec | |
imec.internalnotes | P10 | |