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Device exploration of nanosheet transistors for sub-7nm technology node

dc.contributor.authorJang, Doyoung
dc.contributor.authorYakimets, Dmitry
dc.contributor.authorEneman, Geert
dc.contributor.authorSchuddinck, Pieter
dc.contributor.authorGarcia Bardon, Marie
dc.contributor.authorRaghavan, Praveen
dc.contributor.authorSpessot, Alessio
dc.contributor.authorVerkest, Diederik
dc.contributor.authorMocuta, Anda
dc.date.accessioned2021-10-24T06:14:56Z
dc.date.available2021-10-24T06:14:56Z
dc.date.issued2017
dc.identifier.issn0018-9383
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28585
dc.sourceIIOimport
dc.titleDevice exploration of nanosheet transistors for sub-7nm technology node
dc.typeJournal article
dc.contributor.imecauthorJang, Doyoung
dc.contributor.imecauthorYakimets, Dmitry
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorSchuddinck, Pieter
dc.contributor.imecauthorGarcia Bardon, Marie
dc.contributor.imecauthorSpessot, Alessio
dc.contributor.imecauthorVerkest, Diederik
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecVerkest, Diederik::0000-0001-6567-2746
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage2707
dc.source.endpage2713
dc.source.journalIEEE Transactions on Electron Devices
dc.source.issue6
dc.source.volume64
dc.identifier.urlhttp://ieeexplore.ieee.org/document/7915711/
imec.availabilityPublished - open access


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