Device exploration of nanosheet transistors for sub-7nm technology node

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Author(s)

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Yakimets, Dmitry

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Schuddinck, Pieter

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Garcia Bardon, Marie

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Raghavan, Praveen

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Spessot, Alessio

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Verkest, Diederik

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Journal

IEEE Transactions on Electron Devices

Metrics

1999 since deposited on 2021-10-24

Acq. date: 2025-10-27