Device exploration of nanosheet transistors for sub-7nm technology node

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Authors

Jang, Doyoung; Yakimets, Dmitry; Eneman, Geert; Schuddinck, Pieter; Garcia Bardon, Marie; Raghavan, Praveen; Spessot, Alessio; Verkest, Diederik; Mocuta, Anda

ISSN

0018-9383

Issue

6

Journal

IEEE Transactions on Electron Devices

Volume

64

Title

Device exploration of nanosheet transistors for sub-7nm technology node

Publication type

Journal article

Embargo date

9999-12-31

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