Publication:

Device exploration of nanosheet transistors for sub-7nm technology node

Date

2017
Journal article
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dc.contributor.authorJang, Doyoung
dc.contributor.authorYakimets, Dmitry
dc.contributor.authorEneman, Geert
dc.contributor.authorSchuddinck, Pieter
dc.contributor.authorGarcia Bardon, Marie
dc.contributor.authorRaghavan, Praveen
dc.contributor.authorSpessot, Alessio
dc.contributor.authorVerkest, Diederik
dc.contributor.authorMocuta, Anda
dc.contributor.imecauthorJang, Doyoung
dc.contributor.imecauthorYakimets, Dmitry
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorSchuddinck, Pieter
dc.contributor.imecauthorGarcia Bardon, Marie
dc.contributor.imecauthorSpessot, Alessio
dc.contributor.imecauthorVerkest, Diederik
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecVerkest, Diederik::0000-0001-6567-2746
dc.date.accessioned2021-10-24T06:14:56Z
dc.date.available2021-10-24T06:14:56Z
dc.date.embargo9999-12-31
dc.date.issued2017
dc.identifier.issn0018-9383
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28585
dc.identifier.urlhttp://ieeexplore.ieee.org/document/7915711/
dc.source.beginpage2707
dc.source.endpage2713
dc.source.issue6
dc.source.journalIEEE Transactions on Electron Devices
dc.source.volume64
dc.title

Device exploration of nanosheet transistors for sub-7nm technology node

dc.typeJournal article
dspace.entity.typePublication
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