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Two novel MEMS actuator systems for self-aligned integrated 3D optical coherent tomography scanners

dc.contributor.authorJovic, Aleksandar
dc.contributor.authorPandraud, Gregory
dc.contributor.authorSanchez, Nuria
dc.contributor.authorSancho, Juan
dc.contributor.authorZinoviev, Kirill
dc.contributor.authorRubio, Jose L.
dc.contributor.authorMargallo, Eduardo
dc.contributor.authorSarro, Pasqualina M.
dc.date.accessioned2021-10-24T06:26:09Z
dc.date.available2021-10-24T06:26:09Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28613
dc.sourceIIOimport
dc.titleTwo novel MEMS actuator systems for self-aligned integrated 3D optical coherent tomography scanners
dc.typeProceedings paper
dc.contributor.imecauthorZinoviev, Kirill
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage797
dc.source.endpage800
dc.source.conferenceIEEE 30th International Conference on Micro Electro Mechanical Systems - MEMS
dc.source.conferencedate22/01/2017
dc.source.conferencelocationLas Vegas, NV USA
dc.identifier.urlhttps://ieeexplore.ieee.org/document/7863528/
imec.availabilityPublished - open access


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