dc.contributor.author | Kaczer, Ben | |
dc.contributor.author | Franco, Jacopo | |
dc.contributor.author | Tyaginov, S. E. | |
dc.contributor.author | Jech, M. | |
dc.contributor.author | Rzepa, G. | |
dc.contributor.author | Grasser, T. | |
dc.contributor.author | O'Sullivan, Barry | |
dc.contributor.author | Ritzenthaler, Romain | |
dc.contributor.author | Schram, Tom | |
dc.contributor.author | Spessot, Alessio | |
dc.contributor.author | Linten, Dimitri | |
dc.contributor.author | Horiguchi, Naoto | |
dc.date.accessioned | 2021-10-24T06:28:08Z | |
dc.date.available | 2021-10-24T06:28:08Z | |
dc.date.issued | 2017 | |
dc.identifier.issn | 1071-1023 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/28617 | |
dc.source | IIOimport | |
dc.title | Mapping of CMOS FET degradation in bias space – Application to DRAM peripheral devices | |
dc.type | Journal article | |
dc.contributor.imecauthor | Kaczer, Ben | |
dc.contributor.imecauthor | Franco, Jacopo | |
dc.contributor.imecauthor | O'Sullivan, Barry | |
dc.contributor.imecauthor | Ritzenthaler, Romain | |
dc.contributor.imecauthor | Schram, Tom | |
dc.contributor.imecauthor | Spessot, Alessio | |
dc.contributor.imecauthor | Linten, Dimitri | |
dc.contributor.imecauthor | Horiguchi, Naoto | |
dc.contributor.orcidimec | Kaczer, Ben::0000-0002-1484-4007 | |
dc.contributor.orcidimec | Franco, Jacopo::0000-0002-7382-8605 | |
dc.contributor.orcidimec | O'Sullivan, Barry::0000-0002-9036-8241 | |
dc.contributor.orcidimec | Ritzenthaler, Romain::0000-0002-8615-3272 | |
dc.contributor.orcidimec | Schram, Tom::0000-0003-1533-7055 | |
dc.contributor.orcidimec | Linten, Dimitri::0000-0001-8434-1838 | |
dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 01A109 | |
dc.source.journal | Journal of Vacuum Science and Technology B | |
dc.source.issue | 1 | |
dc.source.volume | 35 | |
dc.identifier.url | http://avs.scitation.org/doi/full/10.1116/1.4972872 | |
imec.availability | Published - imec | |