Show simple item record

A method to interpret micro-Raman experiments made to measure nonuniform stresses: application to local oxidation of silicon structures

dc.contributor.authorPinardi, Kuntjoro
dc.contributor.authorJain, Suresh
dc.contributor.authorWillander, M.
dc.contributor.authorAtkinson, A.
dc.contributor.authorMaes, Herman
dc.contributor.authorVan Overstraeten, Roger
dc.date.accessioned2021-10-01T08:41:04Z
dc.date.available2021-10-01T08:41:04Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2864
dc.sourceIIOimport
dc.titleA method to interpret micro-Raman experiments made to measure nonuniform stresses: application to local oxidation of silicon structures
dc.typeJournal article
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage2507
dc.source.endpage2512
dc.source.journalJournal of Applied Physics
dc.source.issue5
dc.source.volume84
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
2500.pdf
Size:
109.6Kb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record