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A method to interpret micro-Raman experiments made to measure nonuniform stresses: application to local oxidation of silicon structures
Publication:
A method to interpret micro-Raman experiments made to measure nonuniform stresses: application to local oxidation of silicon structures
Date
1998
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pinardi, Kuntjoro
;
Jain, Suresh
;
Willander, M.
;
Atkinson, A.
;
Maes, Herman
;
Van Overstraeten, Roger
Journal
Journal of Applied Physics
Abstract
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1982
since deposited on 2021-10-01
Acq. date: 2025-10-23
Citations
Metrics
Views
1982
since deposited on 2021-10-01
Acq. date: 2025-10-23
Citations