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A method to interpret micro-Raman experiments made to measure nonuniform stresses: application to local oxidation of silicon structures
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1984 since deposited on 2021-10-01
1last month
Acq. date: 2026-01-09
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Metrics
Views
1984 since deposited on 2021-10-01
1last month
Acq. date: 2026-01-09
Citations