Authors

Pinardi, Kuntjoro; Jain, Suresh; Willander, M.; Atkinson, A.; Maes, Herman; Van Overstraeten, Roger

Issue

5

Journal

Journal of Applied Physics

Volume

84

Title

A method to interpret micro-Raman experiments made to measure nonuniform stresses: application to local oxidation of silicon structures

Publication type

Journal article

Embargo date

9999-12-31