Publication:

A method to interpret micro-Raman experiments made to measure nonuniform stresses: application to local oxidation of silicon structures

Date

1998
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorPinardi, Kuntjoro
dc.contributor.authorJain, Suresh
dc.contributor.authorWillander, M.
dc.contributor.authorAtkinson, A.
dc.contributor.authorMaes, Herman
dc.contributor.authorVan Overstraeten, Roger
dc.date.accessioned2021-10-01T08:41:04Z
dc.date.available2021-10-01T08:41:04Z
dc.date.embargo9999-12-31
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2864
dc.source.beginpage2507
dc.source.endpage2512
dc.source.issue5
dc.source.journalJournal of Applied Physics
dc.source.volume84
dc.title

A method to interpret micro-Raman experiments made to measure nonuniform stresses: application to local oxidation of silicon structures

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
2500.pdf
Size:
109.68 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Articles