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Wet clean transfer challenges in 22 nm ? pitch and 16 nm ? pitch structures

dc.contributor.authorKesters, Els
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorLorant, Christophe
dc.contributor.authorHolsteyns, Frank
dc.date.accessioned2021-10-24T06:47:02Z
dc.date.available2021-10-24T06:47:02Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28661
dc.sourceIIOimport
dc.titleWet clean transfer challenges in 22 nm ? pitch and 16 nm ? pitch structures
dc.typeProceedings paper
dc.contributor.imecauthorKesters, Els
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorLorant, Christophe
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecLorant, Christophe::0000-0001-7363-9348
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage37
dc.source.endpage49
dc.source.conferenceSurface Preparation and Cleaning Conference - SPCC
dc.source.conferencedate27/03/2017
dc.source.conferencelocationAustin, TX USA
dc.identifier.urlhttps://spcc2017.com/wp-content/uploads/2017/03/01-03-Kesters-imec-Wet_clean_challenges_in_22-16nm_%C2%BD_pitch_final.pdf
imec.availabilityPublished - open access


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