Design and pitch scaling for affordable node transition and EUV insertion scenario

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Authors
Kim, Ryan Ryoung han; Ryckaert, Julien; Raghavan, Praveen; Sherazi, Yasser; Debacker, Peter; Trivkovic, Darko; Gillijns, Werner; Tan, Ling Ee; Drissi, Youssef; Blanco, Victor; Bekaert, Joost; Mao, Ming; Lariviere, Stephane; McIntyre, Greg
DOI
10.1117/12.2257885
Conference
Design-Process-Technology Co-optimization for Manufacturability XI
Title
Design and pitch scaling for affordable node transition and EUV insertion scenario
Publication type
Proceedings paper
Embargo date
9999-12-31
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