Publication:

Study of SiGe cleaning

Date

2017

Proceedings Paper

https://doi.org/10.1149/08002.0141ecst

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Author(s)

;

;

;

Loyo Prado, Jana

;

Conard, Thierry

;

;

Ragnarsson, Lars-Ake

;

Horiguchi, Naoto

;

Holsteyns, Frank

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Acq. date: 2026-09-14