Authors

Komori, Kana; Wostyn, Kurt; Rondas, Dirk; Loyo Prado, Jana; Conard, Thierry; Loo, Roger; Ragnarsson, Lars-Ake; Horiguchi, Naoto; Holsteyns, Frank

DOI

10.1149/08002.0141ecst

Conference

232nd ECS Meeting: 15th International Symposium on Semiconductor Cleaning and Technology - SCST15

Title

Study of SiGe cleaning

Publication type

Proceedings paper