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Plasma induced damage mitigation in spin-on self-assembly based ultra low-k dielectrics using template residues

dc.contributor.authorKrishtab, Mikhail
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-24T07:09:46Z
dc.date.available2021-10-24T07:09:46Z
dc.date.issued2017
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28713
dc.sourceIIOimport
dc.titlePlasma induced damage mitigation in spin-on self-assembly based ultra low-k dielectrics using template residues
dc.typeJournal article
dc.contributor.imecauthorKrishtab, Mikhail
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage13105
dc.source.journalApplied Physics Letters
dc.source.issue1
dc.source.volume110
dc.identifier.urlhttp://aip.scitation.org/doi/full/10.1063/1.4973474
imec.availabilityPublished - open access


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