Authors

Krishtab, Mikhail; de Marneffe, Jean-Francois; De Gendt, Stefan; Baklanov, Mikhaïl

ISSN

0003-6951

Issue

1

Journal

Applied Physics Letters

Volume

110

Title

Plasma induced damage mitigation in spin-on self-assembly based ultra low-k dielectrics using template residues

Publication type

Journal article

Embargo date

9999-12-31