Publication:
Plasma induced damage mitigation in spin-on self-assembly based ultra low-k dielectrics using template residues
Date
| dc.contributor.author | Krishtab, Mikhail | |
| dc.contributor.author | de Marneffe, Jean-Francois | |
| dc.contributor.author | De Gendt, Stefan | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.imecauthor | Krishtab, Mikhail | |
| dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
| dc.contributor.imecauthor | De Gendt, Stefan | |
| dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
| dc.date.accessioned | 2021-10-24T07:09:46Z | |
| dc.date.available | 2021-10-24T07:09:46Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2017 | |
| dc.identifier.issn | 0003-6951 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/28713 | |
| dc.identifier.url | http://aip.scitation.org/doi/full/10.1063/1.4973474 | |
| dc.source.beginpage | 13105 | |
| dc.source.issue | 1 | |
| dc.source.journal | Applied Physics Letters | |
| dc.source.volume | 110 | |
| dc.title | Plasma induced damage mitigation in spin-on self-assembly based ultra low-k dielectrics using template residues | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
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