Limitations on lateral nanowire scaling beyond 7nm node

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Authors

Kumar Das, Uttam; Garcia Bardon, Marie; Jang, Doyoung; Eneman, Geert; Schuddinck, Pieter; Yakimets, Dmitry; Raghavan, Praveen; Groeseneken, Guido

ISSN

0741-3106

Issue

1

Journal

IEEE Electron Device Letters

Volume

38

Title

Limitations on lateral nanowire scaling beyond 7nm node

Publication type

Journal article

Embargo date

9999-12-31

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