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Limitations on lateral nanowire scaling beyond 7nm node

dc.contributor.authorKumar Das, Uttam
dc.contributor.authorGarcia Bardon, Marie
dc.contributor.authorJang, Doyoung
dc.contributor.authorEneman, Geert
dc.contributor.authorSchuddinck, Pieter
dc.contributor.authorYakimets, Dmitry
dc.contributor.authorRaghavan, Praveen
dc.contributor.authorGroeseneken, Guido
dc.date.accessioned2021-10-24T07:12:31Z
dc.date.available2021-10-24T07:12:31Z
dc.date.issued2017
dc.identifier.issn0741-3106
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28719
dc.sourceIIOimport
dc.titleLimitations on lateral nanowire scaling beyond 7nm node
dc.typeJournal article
dc.contributor.imecauthorGarcia Bardon, Marie
dc.contributor.imecauthorJang, Doyoung
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorSchuddinck, Pieter
dc.contributor.imecauthorYakimets, Dmitry
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecGroeseneken, Guido::0000-0003-3763-2098
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage9
dc.source.endpage11
dc.source.journalIEEE Electron Device Letters
dc.source.issue1
dc.source.volume38
dc.identifier.urlhttp://ieeexplore.ieee.org/document/7745952/
imec.availabilityPublished - open access


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