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Simulation of mechanical stresses during shallow trench isolation process

dc.contributor.authorPoncet, A.
dc.contributor.authorBolt, M.
dc.contributor.authorBarla, K.
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-01T08:42:10Z
dc.date.available2021-10-01T08:42:10Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2871
dc.sourceIIOimport
dc.titleSimulation of mechanical stresses during shallow trench isolation process
dc.typeProceedings paper
dc.contributor.imecauthorDe Wolf, Ingrid
dc.source.peerreviewno
dc.source.beginpage120
dc.source.endpage123
dc.source.conferenceProceedings of the 28th European Solid-State Device Research Conference - ESSDERC'98; 8-10 Sept. 1998; Bordeaux, France.
dc.source.conferencelocation
imec.availabilityPublished - imec


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