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Material aspects of a a-SiN:H based 2D direct X-ray sensor array

dc.contributor.authorPopov, I.
dc.contributor.authorVan Doorselaer, Geert
dc.contributor.authorVan Calster, Andre
dc.contributor.authorDe Smet, Herbert
dc.contributor.authorCallens, F.
dc.contributor.authorBoesman, E.
dc.date.accessioned2021-10-01T08:42:29Z
dc.date.available2021-10-01T08:42:29Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2873
dc.sourceIIOimport
dc.titleMaterial aspects of a a-SiN:H based 2D direct X-ray sensor array
dc.typeProceedings paper
dc.contributor.imecauthorVan Calster, Andre
dc.contributor.imecauthorDe Smet, Herbert
dc.contributor.orcidimecDe Smet, Herbert::0000-0001-9640-8454
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage231
dc.source.endpage236
dc.source.conferenceAmorphous and Microcrystalline Silicon Technology-1998
dc.source.conferencedate13/04/1998
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec
imec.internalnotesMRS Symposium Proceedings; Vol. 507


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