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Compositional analysis on ensemble of InGaAs fins using TEM and Rutherford backscattering spectrometry

dc.contributor.authorLaricchiuta, Grazia
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorVickridge, Ian
dc.contributor.authorMayer, Matej
dc.contributor.authorFavia, Paola
dc.contributor.authorSchulze, Andreas
dc.contributor.authorMeersschaut, Johan
dc.date.accessioned2021-10-24T07:29:15Z
dc.date.available2021-10-24T07:29:15Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28758
dc.sourceIIOimport
dc.titleCompositional analysis on ensemble of InGaAs fins using TEM and Rutherford backscattering spectrometry
dc.typeMeeting abstract
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.source.peerreviewno
dc.source.conferenceEuropean Materials Research Society Fall Meeting
dc.source.conferencedate18/09/2017
dc.source.conferencelocationWarsaw Poland
imec.availabilityPublished - imec


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