N5 BEOL process options patterning flows comparing 193immersion to hybrid EUV or full EUV

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Authors
Lariviere, Stephane; Briggs, Basoene; Wilson, Chris; Mallik, Arindam; Decoster, Stefan; Wan, Danny; Bekaert, Joost; Blanco, Victor; Mao, Ming; Paolillo, Sara; Kutrzeba Kotowska, Bogumila; Versluijs, Janko; Boemmels, Juergen; Trivkovic, Darko; Tokei, Zsolt; McIntyre, Greg; Mocuta, Dan
Conference
49th International Conferece on Solid State Devices and Materials - SSDM
Title
N5 BEOL process options patterning flows comparing 193immersion to hybrid EUV or full EUV
Publication type
Proceedings paper
Embargo date
9999-12-31
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