Publication:

N5 BEOL process options patterning flows comparing 193immersion to hybrid EUV or full EUV

Date

2017

Proceedings Paper

Simple item page Full metadata Statistics

Files

36621.pdf 386.33 KB

Author(s)

Lariviere, Stephane

;

Briggs, Basoene

;

;

Mallik, Arindam

;

Decoster, Stefan

;

;

;

;

;

;

Kutrzeba Kotowska, Bogumila

;

Versluijs, Janko

;

Boemmels, Juergen

;

Trivkovic, Darko

;

;

;

Statistics

2045 since deposited on 2021-10-24

1last month

1last week

Acq. date: 2026-04-05