Publication:

N5 BEOL process options patterning flows comparing 193immersion to hybrid EUV or full EUV

Date

2017

Proceedings Paper

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Files

36621.pdf 386.33 KB

Author(s)

Lariviere, Stephane

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Briggs, Basoene

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Mallik, Arindam

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Decoster, Stefan

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Kutrzeba Kotowska, Bogumila

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Versluijs, Janko

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Boemmels, Juergen

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Trivkovic, Darko

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