Publication:

N5 BEOL process options patterning flows comparing 193immersion to hybrid EUV or full EUV

Date

2017

Proceedings Paper

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Files

36621.pdf 386.33 KB

Author(s)

Lariviere, Stephane

;

Briggs, Basoene

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;

Mallik, Arindam

;

Decoster, Stefan

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;

;

;

;

Kutrzeba Kotowska, Bogumila

;

Versluijs, Janko

;

Boemmels, Juergen

;

Trivkovic, Darko

;

;

;

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