Metrology challenges for in line process control

dc.contributor.author	Leray, Philippe
dc.date.accessioned	2021-10-24T07:41:29Z
dc.date.available	2021-10-24T07:41:29Z
dc.date.issued	2017
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/28785
dc.source	IIOimport
dc.title	Metrology challenges for in line process control
dc.type	Proceedings paper
dc.contributor.imecauthor	Leray, Philippe
dc.date.embargo	9999-12-31
dc.source.peerreview	yes
dc.source.beginpage	1014503
dc.source.conference	Metrology, Inspection, and Process Control for Microlithography XXXI
dc.source.conferencedate	22/02/2017
dc.source.conferencelocation	San Jose, CA USA
dc.identifier.url	https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10145/1014503/Metrology-challenges-for-in-line-process-control
imec.availability	Published - open access
imec.internalnotes	Proceedings of SPIE; Vol. 10145