Publication:
A new scaling issue in the electrical behavior of damascene versus plasma-etched interconnects
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1938 since deposited on 2021-10-01
3last month
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Acq. date: 2026-08-15
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Statistics
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1938 since deposited on 2021-10-01
3last month
1last week
Acq. date: 2026-08-15
Citations