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Modal analysis based equivalent circuit model and its verification for a single cMUT cell

dc.contributor.authorMao, Shengping
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorRochus, Veronique
dc.contributor.authorCzarnecki, Piotr
dc.contributor.authorHelin, Philippe
dc.contributor.authorSeveri, Simone
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-24T08:43:31Z
dc.date.available2021-10-24T08:43:31Z
dc.date.issued2017
dc.identifier.issn0960-1317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28913
dc.sourceIIOimport
dc.titleModal analysis based equivalent circuit model and its verification for a single cMUT cell
dc.typeJournal article
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorCzarnecki, Piotr
dc.contributor.imecauthorHelin, Philippe
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewyes
dc.source.beginpage35001
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.issue3
dc.source.volume27
dc.identifier.urlhttp://iopscience.iop.org/article/10.1088/1361-6439/aa53ce/meta
imec.availabilityPublished - imec


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