Modal analysis based equivalent circuit model and its verification for a single cMUT cell

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Authors

Mao, Shengping; Rottenberg, Xavier; Rochus, Veronique; Czarnecki, Piotr; Helin, Philippe; Severi, Simone; Nauwelaers, Bart; Tilmans, Harrie

ISSN

0960-1317

Issue

3

Journal

Journal of Micromechanics and Microengineering

Volume

27

Title

Modal analysis based equivalent circuit model and its verification for a single cMUT cell

Publication type

Journal article

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