Publication:

Modal analysis based equivalent circuit model and its verification for a single cMUT cell

Date

2017
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorMao, Shengping
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorRochus, Veronique
dc.contributor.authorCzarnecki, Piotr
dc.contributor.authorHelin, Philippe
dc.contributor.authorSeveri, Simone
dc.contributor.authorNauwelaers, Bart
dc.contributor.authorTilmans, Harrie
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorCzarnecki, Piotr
dc.contributor.imecauthorHelin, Philippe
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorNauwelaers, Bart
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.accessioned2021-10-24T08:43:31Z
dc.date.available2021-10-24T08:43:31Z
dc.date.issued2017
dc.identifier.issn0960-1317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28913
dc.identifier.urlhttp://iopscience.iop.org/article/10.1088/1361-6439/aa53ce/meta
dc.source.beginpage35001
dc.source.issue3
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.volume27
dc.title

Modal analysis based equivalent circuit model and its verification for a single cMUT cell

dc.typeJournal article
dspace.entity.typePublication
Files
Publication available in collections:
Articles