Publication:

Fundamentals of Ge1-xSnx and SiyGe1-x-ySnx RPCVD epitaxy

Date

2017
Journal article
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Author(s)

Margetis, Joe
;
Mosleh, Aboozar
;
Ghetmiri, Seyed Amir
;
Al-Kabi, Sattar
;
Dou, Wei
;
Du, Wei
;
Bhargava, Nupur
;
Yu, Shui-Qing
;
Profijt, Harald
;
Kohen, David
;
Loo, Roger  
;
Vohra, Anurag  
;
Tolle, John

Journal

Material Science in Semiconcductor Processing

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1978 since deposited on 2021-10-24
Acq. date: 2026-04-02

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1978 since deposited on 2021-10-24
Acq. date: 2026-04-02

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