Fundamentals of Ge1-xSnx and SiyGe1-x-ySnx RPCVD epitaxy

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Authors
Margetis, Joe; Mosleh, Aboozar; Ghetmiri, Seyed Amir; Al-Kabi, Sattar; Dou, Wei; Du, Wei; Bhargava, Nupur; Yu, Shui-Qing; Profijt, Harald; Kohen, David; Loo, Roger; Vohra, Anurag; Tolle, John
Journal
Material Science in Semiconcductor Processing
Volume
70
Title
Fundamentals of Ge1-xSnx and SiyGe1-x-ySnx RPCVD epitaxy
Publication type
Journal article
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