Show simple item record

Deposition of trace metals to a wafer surface from lithography materials

dc.contributor.authorRamage, R. W.
dc.contributor.authorVos, Rita
dc.contributor.authorMeuris, Marc
dc.contributor.authorLux, Marcel
dc.date.accessioned2021-10-01T08:45:32Z
dc.date.available2021-10-01T08:45:32Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2892
dc.sourceIIOimport
dc.titleDeposition of trace metals to a wafer surface from lithography materials
dc.typeProceedings paper
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorLux, Marcel
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage941
dc.source.endpage952
dc.source.conferenceAdvances in Resist Technology and Processing XV
dc.source.conferencedate23/02/1998
dc.source.conferencelocationSanta Clara, CA USA
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 3333


Files in this item

Thumbnail
Name:
2872.pdf
Size:
1.604Mb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record