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Atom probe tomography analysis of SiGe fins embedded in SiO2: facts and artefacts

dc.contributor.authorMelkonyan, Davit
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorArnoldi, Laurent
dc.contributor.authorDemeulemeester, Jelle
dc.contributor.authorKumar, Arul
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorVurpillot, Francois
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-24T09:05:01Z
dc.date.available2021-10-24T09:05:01Z
dc.date.issued2017
dc.identifier.issn0304-3991
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28957
dc.sourceIIOimport
dc.titleAtom probe tomography analysis of SiGe fins embedded in SiO2: facts and artefacts
dc.typeJournal article
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.source.peerreviewyes
dc.source.beginpage100
dc.source.endpage107
dc.source.journalUltramicroscopy
dc.source.volume179
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0304399117300293
imec.availabilityPublished - imec


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