Show simple item record

Resolving the 3D boron distribution in vertical Si nanowires using atom probe tomography

dc.contributor.authorMelkonyan, Davit
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorArnoldi, Laurent
dc.contributor.authorVeloso, Anabela
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorMorris, Richard
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-24T09:05:37Z
dc.date.available2021-10-24T09:05:37Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28958
dc.sourceIIOimport
dc.titleResolving the 3D boron distribution in vertical Si nanowires using atom probe tomography
dc.typeMeeting abstract
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorMorris, Richard
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecMorris, Richard::0000-0002-0902-7088
dc.source.peerreviewno
dc.source.beginpageP 8.3
dc.source.conferenceE-MRS Spring Meeting Symposium P: Silicon and Silicon Nanostructures
dc.source.conferencedate22/05/2017
dc.source.conferencelocationStrasbourg France
dc.identifier.urlhttps://www.european-mrs.com/sites/default/files/pdf/conference_program.pdf
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record