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Accuracy in APT analysis: The case of boron in silicon

dc.contributor.authorMelkonyan, Davit
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorMorris, Richard
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-24T09:06:06Z
dc.date.available2021-10-24T09:06:06Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28959
dc.sourceIIOimport
dc.titleAccuracy in APT analysis: The case of boron in silicon
dc.typeMeeting abstract
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorMorris, Richard
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecMorris, Richard::0000-0002-0902-7088
dc.source.peerreviewno
dc.source.conference79th IUVSTA Workshop
dc.source.conferencedate13/05/2017
dc.source.conferencelocationSardinia Italy
imec.availabilityPublished - imec


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