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Study of mass transport for efficient fluid processing

dc.contributor.authorMertens, Paul
dc.contributor.authorHaslinger, Michael
dc.contributor.authorSoha, Marton
dc.contributor.authorJohn, Joachim
dc.date.accessioned2021-10-24T09:13:24Z
dc.date.available2021-10-24T09:13:24Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28972
dc.sourceIIOimport
dc.titleStudy of mass transport for efficient fluid processing
dc.typeProceedings paper
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorJohn, Joachim
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage73
dc.source.endpage79
dc.source.conference232nd ECS Fall Meeting - 15th International Symposium on Semiconductor Cleaning Science and Technology - SCST15
dc.source.conferencedate1/10/2017
dc.source.conferencelocationNational Harbor, MD USA
dc.identifier.urlhttp://ecst.ecsdl.org/content/80/2/73.abstract
imec.availabilityPublished - open access
imec.internalnotesECS Transactions; Vol. 80, Issue 2


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