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Atom probe conditions for stoichiometric quantification of GaN and Al1 xGaxN
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Authors
Morris, Richard
;
Arnoldi, Laurent
;
Cuduvally, Ramya
;
Melkonyan, Davit
;
Fleischmann, Claudia
;
Zhao, Ming
;
Vandervorst, Wilfried
Conference
21st International Conference on Secondary Ion Mass spectrometry - SIMS
Title
Atom probe conditions for stoichiometric quantification of GaN and Al1 xGaxN
Publication type
Oral presentation
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