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Interface profiling to sub-nm precision using uleSIMS

dc.contributor.authorMorris, Richard
dc.contributor.authorHase, Thomas
dc.contributor.authorSanchez, Ana
dc.contributor.authorRowlands, George
dc.date.accessioned2021-10-24T09:39:26Z
dc.date.available2021-10-24T09:39:26Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29024
dc.sourceIIOimport
dc.titleInterface profiling to sub-nm precision using uleSIMS
dc.typeMeeting abstract
dc.contributor.imecauthorMorris, Richard
dc.contributor.orcidimecMorris, Richard::0000-0002-0902-7088
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage68
dc.source.conference21st International Conference on Secondary Ion Mass Spectrometry - SIMS
dc.source.conferencedate10/09/2017
dc.source.conferencelocationKrakow Poland
dc.identifier.urlhttp://sims.confer.uj.edu.pl/resources/Book_of_Abstracts_A4_v1.pdf
imec.availabilityPublished - open access
imec.internalnotesoral presentation (SN1-Mon2-3-2)


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