Atomically controlled processing for in-situ doping in CVD Si and Ge epitaxial growth

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Authors
Murota, Junichi; Yamamoto, Yuchi; Costina, Ioan; Tillack, Bernd; Le Thanh, Vin; Loo, Roger; Caymax, Matty
Conference
1st International Semiconductor Conference for Global Challenges - ISCGC
Title
Atomically controlled processing for in-situ doping in CVD Si and Ge epitaxial growth
Publication type
Meeting abstract
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