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On thin-film MCM-D interconnects

dc.contributor.authorRoggen, Jean
dc.contributor.authorBeyne, Eric
dc.contributor.authorTruzzi, Claudio
dc.contributor.authorRingoot, Edwin
dc.contributor.authorPieters, Philip
dc.date.accessioned2021-10-01T08:47:57Z
dc.date.available2021-10-01T08:47:57Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2906
dc.sourceIIOimport
dc.titleOn thin-film MCM-D interconnects
dc.typeProceedings paper
dc.contributor.imecauthorBeyne, Eric
dc.contributor.imecauthorPieters, Philip
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage141
dc.source.endpage144
dc.source.conferenceMicroelectronic Interconnects and Assembly. Proceedings of the NATO Advanced Research Workshop
dc.source.conferencedate18/05/1996
dc.source.conferencelocationPrague Czech Republic
imec.availabilityPublished - open access


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