On thin-film MCM-D interconnects
dc.contributor.author | Roggen, Jean | |
dc.contributor.author | Beyne, Eric | |
dc.contributor.author | Truzzi, Claudio | |
dc.contributor.author | Ringoot, Edwin | |
dc.contributor.author | Pieters, Philip | |
dc.date.accessioned | 2021-10-01T08:47:57Z | |
dc.date.available | 2021-10-01T08:47:57Z | |
dc.date.issued | 1998 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2906 | |
dc.source | IIOimport | |
dc.title | On thin-film MCM-D interconnects | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Beyne, Eric | |
dc.contributor.imecauthor | Pieters, Philip | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 141 | |
dc.source.endpage | 144 | |
dc.source.conference | Microelectronic Interconnects and Assembly. Proceedings of the NATO Advanced Research Workshop | |
dc.source.conferencedate | 18/05/1996 | |
dc.source.conferencelocation | Prague Czech Republic | |
imec.availability | Published - open access |