dc.contributor.author | Ogawa, Yuichi | |
dc.contributor.author | Masaoka, Toru | |
dc.contributor.author | Gan, Nobuko | |
dc.contributor.author | Fujimura, Yu | |
dc.contributor.author | Minato, Yasuharu | |
dc.contributor.author | Miyazaki, Yoichi | |
dc.contributor.author | Wostyn, Kurt | |
dc.contributor.author | Pacco, Antoine | |
dc.contributor.author | Holsteyns, Frank | |
dc.contributor.author | Yoshida, Yukifumi | |
dc.date.accessioned | 2021-10-24T10:19:27Z | |
dc.date.available | 2021-10-24T10:19:27Z | |
dc.date.issued | 2017 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/29100 | |
dc.source | IIOimport | |
dc.title | Impact of hydrogen peroxide in ultrapure water | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Wostyn, Kurt | |
dc.contributor.imecauthor | Pacco, Antoine | |
dc.contributor.imecauthor | Holsteyns, Frank | |
dc.contributor.orcidimec | Wostyn, Kurt::0000-0003-3995-0292 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 91 | |
dc.source.endpage | 101 | |
dc.source.conference | Surface Preparation and Cleaning Conference - SPCC | |
dc.source.conferencedate | 27/03/2017 | |
dc.source.conferencelocation | Cambridge, MA USA | |
dc.identifier.url | https://linxconferences.com/wp-content/uploads/2017/03/01-08-Ogawa-Kurita-Effect_of_dilute_hydrogen_peroxide_in_ultrapure_water. | |
imec.availability | Published - open access | |