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Impact of hydrogen peroxide in ultrapure water

dc.contributor.authorOgawa, Yuichi
dc.contributor.authorMasaoka, Toru
dc.contributor.authorGan, Nobuko
dc.contributor.authorFujimura, Yu
dc.contributor.authorMinato, Yasuharu
dc.contributor.authorMiyazaki, Yoichi
dc.contributor.authorWostyn, Kurt
dc.contributor.authorPacco, Antoine
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorYoshida, Yukifumi
dc.date.accessioned2021-10-24T10:19:27Z
dc.date.available2021-10-24T10:19:27Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29100
dc.sourceIIOimport
dc.titleImpact of hydrogen peroxide in ultrapure water
dc.typeProceedings paper
dc.contributor.imecauthorWostyn, Kurt
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.orcidimecWostyn, Kurt::0000-0003-3995-0292
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage91
dc.source.endpage101
dc.source.conferenceSurface Preparation and Cleaning Conference - SPCC
dc.source.conferencedate27/03/2017
dc.source.conferencelocationCambridge, MA USA
dc.identifier.urlhttps://linxconferences.com/wp-content/uploads/2017/03/01-08-Ogawa-Kurita-Effect_of_dilute_hydrogen_peroxide_in_ultrapure_water.
imec.availabilityPublished - open access


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