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Substrate independent elastic modulus of thin low dielectric constant materials

dc.contributor.authorOkudur, Oguzhan Orkut
dc.contributor.authorVanstreels, Kris
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorHangen, Ude
dc.contributor.authorQiu, Anqi
dc.date.accessioned2021-10-24T10:22:55Z
dc.date.available2021-10-24T10:22:55Z
dc.date.issued2017
dc.identifier.issn1438-1656
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29106
dc.sourceIIOimport
dc.titleSubstrate independent elastic modulus of thin low dielectric constant materials
dc.typeJournal article
dc.contributor.imecauthorOkudur, Oguzhan Orkut
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecOkudur, Oguzhan Orkut::0000-0002-4790-7772
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewyes
dc.source.beginpage1600653
dc.source.journalAdvanced Engineering Materials
dc.source.issue8
dc.source.volume19
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/adem.201600653/full
imec.availabilityPublished - imec


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