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Substrate independent elastic modulus of thin low dielectric constant materials
Publication:
Substrate independent elastic modulus of thin low dielectric constant materials
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Date
2017
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Okudur, Oguzhan Orkut
;
Vanstreels, Kris
;
De Wolf, Ingrid
;
Hangen, Ude
;
Qiu, Anqi
Journal
Advanced Engineering Materials
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1985
since deposited on 2021-10-24
1
last month
Acq. date: 2025-12-18
Citations
Metrics
Views
1985
since deposited on 2021-10-24
1
last month
Acq. date: 2025-12-18
Citations