Substrate independent elastic modulus of thin low dielectric constant materials

dc.contributor.author	Okudur, Oguzhan Orkut
dc.contributor.author	Vanstreels, Kris
dc.contributor.author	De Wolf, Ingrid
dc.contributor.author	Hangen, Ude
dc.contributor.author	Qiu, Anqi
dc.contributor.imecauthor	Okudur, Oguzhan Orkut
dc.contributor.imecauthor	Vanstreels, Kris
dc.contributor.imecauthor	De Wolf, Ingrid
dc.contributor.orcidimec	Okudur, Oguzhan Orkut::0000-0002-4790-7772
dc.contributor.orcidimec	Vanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimec	De Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned	2021-10-24T10:22:55Z
dc.date.available	2021-10-24T10:22:55Z
dc.date.issued	2017
dc.identifier.issn	1438-1656
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/29106
dc.identifier.url	http://onlinelibrary.wiley.com/doi/10.1002/adem.201600653/full
dc.source.beginpage	1600653
dc.source.issue	8
dc.source.journal	Advanced Engineering Materials
dc.source.volume	19
dc.title	Substrate independent elastic modulus of thin low dielectric constant materials
dc.type	Journal article
dspace.entity.type	Publication
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