dc.contributor.author | Paolillo, Sara | |
dc.contributor.author | Lazzarino, Frederic | |
dc.contributor.author | Rassoul, Nouredine | |
dc.contributor.author | Wan, Danny | |
dc.contributor.author | Piumi, Daniele | |
dc.contributor.author | Tokei, Zsolt | |
dc.date.accessioned | 2021-10-24T10:42:52Z | |
dc.date.available | 2021-10-24T10:42:52Z | |
dc.date.issued | 2017 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/29142 | |
dc.source | IIOimport | |
dc.title | Direct metal etch evaluation for advanced interconnect | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Paolillo, Sara | |
dc.contributor.imecauthor | Lazzarino, Frederic | |
dc.contributor.imecauthor | Rassoul, Nouredine | |
dc.contributor.imecauthor | Wan, Danny | |
dc.contributor.imecauthor | Piumi, Daniele | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.orcidimec | Lazzarino, Frederic::0000-0001-7961-9727 | |
dc.contributor.orcidimec | Rassoul, Nouredine::0000-0001-9489-3396 | |
dc.contributor.orcidimec | Wan, Danny::0000-0003-4847-3184 | |
dc.source.peerreview | yes | |
dc.source.beginpage | PS-WeM2 | |
dc.source.conference | AVS 64th International Symposium & Exhibition | |
dc.source.conferencedate | 29/10/2017 | |
dc.source.conferencelocation | Tampa, FL USA | |
dc.identifier.url | http://www2.avs.org/symposium2017/Papers/Paper_PS-WeM2.html | |
imec.availability | Published - imec | |