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Evaluation of multilayer graphene for advanced interconnects

dc.contributor.authorPolitou, Maria
dc.contributor.authorWu, Xiangyu
dc.contributor.authorAsselberghs, Inge
dc.contributor.authorContino, Antonino
dc.contributor.authorSoree, Bart
dc.contributor.authorRadu, Iuliana
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorTokei, Zsolt
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-24T11:15:01Z
dc.date.available2021-10-24T11:15:01Z
dc.date.issued2017
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29201
dc.sourceIIOimport
dc.titleEvaluation of multilayer graphene for advanced interconnects
dc.typeJournal article
dc.contributor.imecauthorWu, Xiangyu
dc.contributor.imecauthorAsselberghs, Inge
dc.contributor.imecauthorContino, Antonino
dc.contributor.imecauthorSoree, Bart
dc.contributor.imecauthorRadu, Iuliana
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecSoree, Bart::0000-0002-4157-1956
dc.contributor.orcidimecRadu, Iuliana::0000-0002-7230-7218
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1
dc.source.endpage5
dc.source.journalMicroelectronic Engineering
dc.source.volume167
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S016793171630421X
imec.availabilityPublished - open access
imec.internalnotesSpecial issue MAM conference 2016


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