Evaluation of multilayer graphene for advanced interconnects

Thumbnail
View/open
Metadata
Show full item record
Authors
Politou, Maria; Wu, Xiangyu; Asselberghs, Inge; Contino, Antonino; Soree, Bart; Radu, Iuliana; Huyghebaert, Cedric; Tokei, Zsolt; De Gendt, Stefan; Heyns, Marc
ISSN
0167-9317
Journal
Microelectronic Engineering
Volume
167
Title
Evaluation of multilayer graphene for advanced interconnects
Publication type
Journal article
Embargo date
9999-12-31
Collections