Publication:

Evaluation of multilayer graphene for advanced interconnects

Date

2017
Journal article
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dc.contributor.authorPolitou, Maria
dc.contributor.authorWu, Xiangyu
dc.contributor.authorAsselberghs, Inge
dc.contributor.authorContino, Antonino
dc.contributor.authorSoree, Bart
dc.contributor.authorRadu, Iuliana
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorTokei, Zsolt
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorWu, Xiangyu
dc.contributor.imecauthorAsselberghs, Inge
dc.contributor.imecauthorContino, Antonino
dc.contributor.imecauthorSoree, Bart
dc.contributor.imecauthorRadu, Iuliana
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecSoree, Bart::0000-0002-4157-1956
dc.contributor.orcidimecRadu, Iuliana::0000-0002-7230-7218
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-24T11:15:01Z
dc.date.available2021-10-24T11:15:01Z
dc.date.embargo9999-12-31
dc.date.issued2017
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29201
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S016793171630421X
dc.source.beginpage1
dc.source.endpage5
dc.source.journalMicroelectronic Engineering
dc.source.volume167
dc.title

Evaluation of multilayer graphene for advanced interconnects

dc.typeJournal article
dspace.entity.typePublication
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