Evaluation of multilayer graphene for advanced interconnects

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Author(s)

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Asselberghs, Inge

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Contino, Antonino

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Huyghebaert, Cedric

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De Gendt, Stefan

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Journal

Microelectronic Engineering

Metrics

1977 since deposited on 2021-10-24

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Acq. date: 2025-10-25