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Post epitaxy thermal treatment and passivation for extended carrier lifetime in Ge virtual substrates

dc.contributor.authorPorret, Clément
dc.contributor.authorSrinivasan, Ashwyn
dc.contributor.authorCott, Daire
dc.contributor.authorPaul, Rajrupa
dc.contributor.authorAnand, Sakshi
dc.contributor.authorPantouvaki, Marianna
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorVan Campenhout, Joris
dc.contributor.authorLoo, Roger
dc.date.accessioned2021-10-24T11:18:41Z
dc.date.available2021-10-24T11:18:41Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29207
dc.sourceIIOimport
dc.titlePost epitaxy thermal treatment and passivation for extended carrier lifetime in Ge virtual substrates
dc.typeMeeting abstract
dc.contributor.imecauthorPorret, Clément
dc.contributor.imecauthorSrinivasan, Ashwyn
dc.contributor.imecauthorCott, Daire
dc.contributor.imecauthorPantouvaki, Marianna
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorVan Campenhout, Joris
dc.contributor.imecauthorLoo, Roger
dc.contributor.orcidimecPorret, Clément::0000-0002-4561-348X
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecVan Campenhout, Joris::0000-0003-0778-2669
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewno
dc.source.conferenceEuropean Materials Research Society Fall Meeting
dc.source.conferencedate17/09/2017
dc.source.conferencelocationWarsaw Poland
imec.availabilityPublished - imec


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