Authors

Ruzyllo, Jerzy; Röhr, Erika; Baeyens, Martien; Conard, Thierry; Mertens, Paul; Heyns, Marc

Conference

4th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS

Title

Role of UV/chlorine exposure during dry surface conditioning before integrated epi deposition process

Publication type

Oral presentation